Medford, Oregon, March 5, 2014 – Rogue Valley Microdevices (RVM), a MEMS foundry service provider, announced this week that it has acquired cleanroom equipment from the 10,000 square foot ...
Paul Bergstrom’s research interests include the integration of microelectromechanical (MEMS) elements with microelectronics processing in ways which minimize the impact of the MEMS processing on the ...
I think it is safe to say that MEMS (micro-electromechanical systems) has become a mature process/manufacturing technology. In the analog world, MEMS sensors (including microphones) have become ...
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